A control method to reduce the standard deviation of flow time in wafer fabrication

This paper proposes a control method for reducing flow time variability in a wafer fabrication facility with multiple wafer types. We employ stochastic petri nets to model and analyze the machine module, and define operation due dates using a novel utilization index metric. An operation due date (OPNDD) rule for lot dispatch is proposed and evaluated against other tot dispatch policies.
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Issue Date
2000-08
Language
ENG
Keywords

STOCHASTIC PETRI NETS; PERFORMANCE EVALUATION; POLICIES

Citation

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.13, no.3, pp.389 - 392

ISSN
0894-6507
URI
http://hdl.handle.net/10203/74694
Appears in Collection
ME-Journal Papers(저널논문)
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