The measurement of electro-optic coefficient of PZT thin films dried at different temperatures using two-beams polarization interferometer

PZT thin films are fabricated on ITO/glass substrates using MOD method. The main processing variable is drying temperature for pyrolysis as 200, 350 and 470 degrees C. The crystallization, microstructure and electric properties are measured. The two-beams polarization interferometer is used for the electro-optic coefficients of the thin films.
Publisher
KOREAN PHYSICAL SOC
Issue Date
1998-02
Language
ENG
Citation

JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.32, pp.442 - 2

ISSN
0374-4884
URI
http://hdl.handle.net/10203/74210
Appears in Collection
MS-Journal Papers(저널논문)
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