직사각형 MEMS 판 구조의 리츠 해석(1): 수식화 및 수치해법 Ritz Analysis of Rectangular MEMS Structures (1)<br>- Formulation and its Implementation -

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We apply the Rayleigh Ritz method to analyze multi-layered plates with residual stresses. The method is very simple, straight forward, and easily programmable, but it should be applied to structures only in simple shapes. We derive coupled variational equations based on the principle of virtual displacement, and investigate what kind of basis functions is desirable for the analysis of rectangular plates with various boundary conditions. We demonstrate the effectiveness and usefulness of the method through several examples. The analysis results obtained with the method are in good agreement with those available in literature. A multi-layered MEMS plate example shows that the coupling effect should not be ignored and that residual stresses do influence the stiffness of the structure very much.
Publisher
대한기계학회
Issue Date
2000-02
Language
Korean
Citation

대한기계학회논문집 A, v.24, no.2, pp.421 - 430

ISSN
1226-4873
URI
http://hdl.handle.net/10203/74198
Appears in Collection
ME-Journal Papers(저널논문)
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