Generation of Various Complex Patterned Structures From a Single Ellipsoidal Dot Prepattern by Capillary Force Lithography

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We report a novel method for creating many different complex structures from a single prepattern that is either prepared from a master mold or stamped onto a solid substrate by patterning with a poly(dimethylsiloxane) (PDMS) replica mold. We show that various metal patterns including ellipses, dots, rings, chains of dots (or rings), ribbons, and wavy lines with various feature sizes can be generated from a single pattern of isolated ellipsoidal dots by simply varying the residual polymer film thickness and the reactive ion etching (RIE) time.
Publisher
John Wiley & Sons
Issue Date
2007
Keywords

dot prepattern; capillary force lithography

Citation

Advanced materials, v.19 no.24, pp.4392-4398

ISSN
0935-9648
DOI
10.1002/adma.200701310
URI
http://hdl.handle.net/10203/7406
Appears in Collection
CBE-Journal Papers(저널논문)

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