저압화학증착된 혼합상 실리콘 박막의 형성기구에 관한 투과전자현미경 연구Transmission Electron Microscopy Study on the Formation Mechanism of the As-Deposited Mixed-Phase LPCVD Silicon Thin Films
- Publisher
- 대한금속재료학회
- Issue Date
- 1995-12
- Language
- Korean
- Citation
대한금속·재료학회지, v.33, no.6, pp.730 - 736
- ISSN
- 1738-8228
- Appears in Collection
- MS-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
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