Microstructural observation of a composite film of c-BN and h-BN phases

BN films consisting of c-BN and h-BN phases were synthesized using an ion-beam-assisted deposition process. In contrast to conventional observations, the c-BN and h-BN phases did not form separate layers, but were distributed in the form of nano-sized grains throughout the film thickness. No distinctly aligned h-BN layer was observed before the c-BN phase. Such a mixed character of the film was attributed to a localized ion bombardment effect instead of the macro-stress. Possibly because of the presence of scattered h-BN phases, the thin film described here possessed a low hardness of about 20 GPa and a low stress of about 5 GPa, compared with other reported c-BN-containing films.
Publisher
CAMBRIDGE UNIV PRESS
Issue Date
2000-11
Language
ENG
Keywords

CUBIC BORON-NITRIDE; BEAM-ASSISTED DEPOSITION; THIN-FILMS; GRAIN-BOUNDARY; GROWTH

Citation

JOURNAL OF MATERIALS RESEARCH, v.15, no.11, pp.2292 - 2295

ISSN
0884-2914
URI
http://hdl.handle.net/10203/73660
Appears in Collection
MS-Journal Papers(저널논문)
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