An atmospheric pressure plasma source

An atmospheric pressure plasma source operated by radio frequency power has been developed. This source produces a unique discharge that is volumetric and homogeneous at atmospheric pressure with a gas temperature below 300 degrees C. It also produces a large quantity of oxygen atoms, similar to 5 x 10(15) cm(-3), which has important value for materials applications. A theoretical model shows electron densities of 0.2-2 x 10(11) cm(-3) and characteristic electron energies of 2-4 eV for helium discharges at a power level of 3-30 W cm(-3). (C) 2000 American Institute of Physics. [S0003-6951(00)01303-6].
Publisher
AMER INST PHYSICS
Issue Date
2000-01
Language
ENG
Keywords

NUMERICAL-MODEL; JET

Citation

APPLIED PHYSICS LETTERS, v.76, no.3, pp.288 - 290

ISSN
0003-6951
DOI
10.1063/1.125724
URI
http://hdl.handle.net/10203/73396
Appears in Collection
PH-Journal Papers(저널논문)
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