Stability of Hydrogenated P-Channel Polycrystalline Silicon Thin Film Transistors with Electron Cyclotron Resonance N2O-Plasma Gate Oxide

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dc.contributor.authorJ.W.Leeko
dc.contributor.authorN.I.Leeko
dc.contributor.authorC.H.Hanko
dc.date.accessioned2013-02-28T06:24:27Z-
dc.date.available2013-02-28T06:24:27Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued1999-01-
dc.identifier.citationIEEE ELECTRON DEVICE LETTERS, v.20, no.1-
dc.identifier.issn0741-3106-
dc.identifier.urihttp://hdl.handle.net/10203/73231-
dc.languageEnglish-
dc.publisherIEEE-Inst Electrical Electronics Engineers Inc-
dc.titleStability of Hydrogenated P-Channel Polycrystalline Silicon Thin Film Transistors with Electron Cyclotron Resonance N2O-Plasma Gate Oxide-
dc.typeArticle-
dc.type.rimsART-
dc.citation.volume20-
dc.citation.issue1-
dc.citation.publicationnameIEEE ELECTRON DEVICE LETTERS-
dc.contributor.localauthorC.H.Han-
dc.contributor.nonIdAuthorJ.W.Lee-
dc.contributor.nonIdAuthorN.I.Lee-
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