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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Journal Papers(저널논문)

STRUCTURE AND ELECTRICAL-PROPERTIES OF PB(ZR,TI)O-3 THIN-FILMS DEPOSITED BY REACTIVE SPUTTERING USING MULTI-TARGETS

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dc.contributor.authorCho, NHko
dc.contributor.authorKim, Ho Giko
dc.date.accessioned2013-02-28T06:23:21Z-
dc.date.available2013-02-28T06:23:21Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued1995-10-
dc.identifier.citationTHIN SOLID FILMS, v.266, no.2, pp.140 - 144-
dc.identifier.issn0040-6090-
dc.identifier.urihttp://hdl.handle.net/10203/73225-
dc.description.abstractLead zirconate titanate (PZT) thin films have been grown on Pt/SiO2/Si substrates by reactive sputtering using multiple metal targets. The PZT crystalline structure and the lead content have been studied and crystal quality effects on the electrical properties were investigated. The film structure deposited at 550 degrees C changed from polycrystalline to the (100)-oriented direction with increasing lead target power. This structural change has a marked influence on dielectric and fatigue properties. Highly oriented films have high remanent polarization and high fatigue resistance. Also we investigated leakage current characteristics of the deposited film with voltage and time.-
dc.languageEnglish-
dc.publisherELSEVIER SCIENCE SA LAUSANNE-
dc.subjectCAPACITORS-
dc.titleSTRUCTURE AND ELECTRICAL-PROPERTIES OF PB(ZR,TI)O-3 THIN-FILMS DEPOSITED BY REACTIVE SPUTTERING USING MULTI-TARGETS-
dc.typeArticle-
dc.identifier.wosidA1995TK28500012-
dc.identifier.scopusid2-s2.0-0029387902-
dc.type.rimsART-
dc.citation.volume266-
dc.citation.issue2-
dc.citation.beginningpage140-
dc.citation.endingpage144-
dc.citation.publicationnameTHIN SOLID FILMS-
dc.identifier.doi10.1016/0040-6090(95)06609-8-
dc.contributor.localauthorKim, Ho Gi-
dc.contributor.nonIdAuthorCho, NH-
dc.description.isOpenAccessN-
dc.type.journalArticleArticle-
dc.subject.keywordAuthorDIELECTRIC PROPERTIES-
dc.subject.keywordAuthorELECTRICAL PROPERTIES AND MEASUREMENTS-
dc.subject.keywordAuthorSPUTTERING-
dc.subject.keywordAuthorSTRUCTURAL PROPERTIES-
dc.subject.keywordPlusCAPACITORS-
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MS-Journal Papers(저널논문)
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