Annealing of RuO2 and Ru Bottom Electrodes and its effects on the Electrical properties of (Ba,Sr)TiO3 thin films

Publisher
Amer Inst Physics
Issue Date
1998-01
Language
ENG
Citation

JOURNAL OF APPLIED PHYSICS, v.37, no.1, pp.284 - 289

ISSN
0021-8979
URI
http://hdl.handle.net/10203/73190
Appears in Collection
MS-Journal Papers(저널논문)
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