Hermetically sealed inductor-capacitor (LC) resonator for remote pressure monitoring

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This paper reports an integrated inductor-capacitor (LC) resonator structure fabricated using bulk micromachining and anodic bonding technologies. In this resonator structure, pressure change monitored by a capacitive pressure sensor results in the change of resonance frequency. The resonance frequency shift is detected by inductive coupling from an external transmission coil; therefore, pressure can be monitored remotely using the passive LC resonator. The fabricated device size measures 3 mm x 3 mm x 0.6 mm. and pressure responsivity has been estimated to be 2 MHz/mmHg. This micromachined, hermetically sealed structure is suitable for biomedical applications such as intraocular, cardiovascular and brain pressure monitoring.
Publisher
JAPAN J APPLIED PHYSICS
Issue Date
1998-12
Language
English
Article Type
Article; Proceedings Paper
Citation

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.37, no.12B, pp.7124 - 7128

ISSN
0021-4922
URI
http://hdl.handle.net/10203/72719
Appears in Collection
EE-Journal Papers(저널논문)RIMS Journal Papers
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