고상 에피택시에 의한 초박막 CoSi2 형성과 Si/epi-CoSi2/Si(111)의 이중헤테로 에피택셜 성장Formation of CoSi2 Film and Double Heteroepitaxial Growth of Si/CoSi2/Si(111) by Solid Phase Epitaxy

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dc.contributor.author최치규ko
dc.contributor.author강민성ko
dc.contributor.author문종ko
dc.contributor.author현동걸ko
dc.contributor.author김건호ko
dc.contributor.author이정용ko
dc.date.accessioned2013-02-28T00:25:39Z-
dc.date.available2013-02-28T00:25:39Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued1998-12-
dc.identifier.citation한국재료학회지, v.8, no.2, pp.165 - 172-
dc.identifier.issn1225-0562-
dc.identifier.urihttp://hdl.handle.net/10203/71736-
dc.languageKorean-
dc.publisher한국재료학회-
dc.title고상 에피택시에 의한 초박막 CoSi2 형성과 Si/epi-CoSi2/Si(111)의 이중헤테로 에피택셜 성장-
dc.title.alternativeFormation of CoSi2 Film and Double Heteroepitaxial Growth of Si/CoSi2/Si(111) by Solid Phase Epitaxy-
dc.typeArticle-
dc.type.rimsART-
dc.citation.volume8-
dc.citation.issue2-
dc.citation.beginningpage165-
dc.citation.endingpage172-
dc.citation.publicationname한국재료학회지-
dc.contributor.localauthor이정용-
dc.contributor.nonIdAuthor최치규-
dc.contributor.nonIdAuthor강민성-
dc.contributor.nonIdAuthor문종-
dc.contributor.nonIdAuthor현동걸-
dc.contributor.nonIdAuthor김건호-
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