고상 에피택시에 의한 초박막 CoSi2 형성과 Si/epi-CoSi2/Si(111)의 이중헤테로 에피택셜 성장 Formation of CoSi2 Film and Double Heteroepitaxial Growth of Si/CoSi2/Si(111) by Solid Phase Epitaxy

Publisher
한국재료학회
Issue Date
1998-12
Language
KOR
Citation

한국재료학회지, v.8, no.2, pp.165 - 172

ISSN
1225-0562
URI
http://hdl.handle.net/10203/71736
Appears in Collection
MS-Journal Papers(저널논문)
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