다결정실리콘 패드를 이용한 평면형 안티퓨즈의 소자특성 및 금속도선 형성에 관한 연구 Device Characteristics and Metal Link Formation in the Planar Antifuse with Poly-Si Pad

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Publisher
대한전자공학회
Issue Date
1996
Language
Korean
Citation

전자공학회논문지, v.33, no.8, pp.1634 - 1642

ISSN
1975-2377
URI
http://hdl.handle.net/10203/71602
Appears in Collection
MS-Journal Papers(저널논문)
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