Raman spectroscopic study of surface layer in $F^+$-implanted Si

Publisher
Japan Soc Applied Physics
Issue Date
1996
Language
ENG
Citation

JAPANESE JOURNAL OF APPLIED PHYSICS, v.80, pp.5509 -

ISSN
0021-4922
URI
http://hdl.handle.net/10203/71474
Appears in Collection
NE-Journal Papers(저널논문)
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