급속열처리와 엑시머 레이저에 의해 형성된 다결정 실리콘 박막에서 열처리 방법에 따른 박막의 특성변화 Comparison of the Characteristics of Polycrystalline Silicon Thin Films Between Rapid Thermal Annealing and laser Annealing Methods

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Publisher
한국재료학회
Issue Date
1997
Language
KOR
Citation

한국재료학회지, v.7, no.10, pp.908 - 913

ISSN
1225-0562
URI
http://hdl.handle.net/10203/69775
Appears in Collection
MS-Journal Papers(저널논문)
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