DC Field | Value | Language |
---|---|---|
dc.contributor.author | Park, SH | ko |
dc.contributor.author | Lee, JM | ko |
dc.contributor.author | Lee, TW | ko |
dc.contributor.author | Park, MP | ko |
dc.contributor.author | Park, Chul Soon | ko |
dc.contributor.author | Kim, IH | ko |
dc.contributor.author | Kim, JY | ko |
dc.date.accessioned | 2013-02-27T17:13:10Z | - |
dc.date.available | 2013-02-27T17:13:10Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1999-06 | - |
dc.identifier.citation | JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.34, pp.427 - 431 | - |
dc.identifier.issn | 0374-4884 | - |
dc.identifier.uri | http://hdl.handle.net/10203/69773 | - |
dc.description.abstract | The Pd/Ge/Au/Ni/Au and Pd/Ge/Pd/Ti/Au ohmic contact systems on n-PnGaAs were investigated and compared. In both contacts, a good ohmic behavior was obtained even without annealing. This is due to their lower barrier height. The contact resistivity was further decreased by rapid thermal annealing. The Pd/Ge/Au/Ni/Au contact was degraded by intermixing of the ohmic metals with InGaAs above 425 degrees C. This indicates that the Ni layer could not act as a diffusion barrier in this contact system. The out-diffusion of the In and As atoms also deteriorated the ohmic contact due to both an increase in barrier height and charge compensation. The Pd/Ge/Pd/Ti/Au contact showed better ohmic behavior compared with the Pd/Ge/Au/Ni/Au contact, especially at high temperature. The Ti layer acted as the diffusion barrier. Non-spiking and planar interfaces were observed even at 450 degrees C. | - |
dc.language | English | - |
dc.publisher | KOREAN PHYSICAL SOC | - |
dc.subject | ELECTRON-MOBILITY TRANSISTORS | - |
dc.subject | GAAS | - |
dc.title | Comparison of the Pd/Ge/Au/Ni/Au and Pd/Ge/Pd/Ti/Au ohmic contacts to N-type InGaAs | - |
dc.type | Article | - |
dc.identifier.wosid | 000081307100047 | - |
dc.identifier.scopusid | 2-s2.0-0033463259 | - |
dc.type.rims | ART | - |
dc.citation.volume | 34 | - |
dc.citation.beginningpage | 427 | - |
dc.citation.endingpage | 431 | - |
dc.citation.publicationname | JOURNAL OF THE KOREAN PHYSICAL SOCIETY | - |
dc.contributor.localauthor | Park, Chul Soon | - |
dc.contributor.nonIdAuthor | Park, SH | - |
dc.contributor.nonIdAuthor | Lee, JM | - |
dc.contributor.nonIdAuthor | Lee, TW | - |
dc.contributor.nonIdAuthor | Park, MP | - |
dc.contributor.nonIdAuthor | Kim, IH | - |
dc.contributor.nonIdAuthor | Kim, JY | - |
dc.type.journalArticle | Article; Proceedings Paper | - |
dc.subject.keywordPlus | ELECTRON-MOBILITY TRANSISTORS | - |
dc.subject.keywordPlus | GAAS | - |
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