DC Field | Value | Language |
---|---|---|
dc.contributor.author | Choi, Yang-Kyu | ko |
dc.contributor.author | King, TJ | ko |
dc.contributor.author | Hu, CM | ko |
dc.date.accessioned | 2007-06-27T06:32:26Z | - |
dc.date.available | 2007-06-27T06:32:26Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2002-03 | - |
dc.identifier.citation | IEEE TRANSACTIONS ON ELECTRON DEVICES, v.49, no.3, pp.436 - 441 | - |
dc.identifier.issn | 0018-9383 | - |
dc.identifier.uri | http://hdl.handle.net/10203/690 | - |
dc.description.abstract | A spacer patterning technology using a sacrificial layer and a chemical vapor deposition (CVD) spacer layer has been developed, and is demonstrated to achieve sub-7 nm structures with conventional dry etching. The minimum-sized features are defined not by the photolithography but by the CND film thickness. Therefore, this technology yields critical dimension (CD) variations of minimum-sized features much smaller than that achieved by optical or e-beam lithography. In addition, it also pro-tides a doubling of device density for a given lithography pitch. This method is used to pattern silicon fins for double-gate metal-oxide semiconductor field effect transistors (MOSFETs) (FinFETs) and gate electrode structures for ultrathin body MOSFETs. Process details are presented. | - |
dc.description.sponsorship | This work was supported in part by the DARPA AME Program under Contract N66001-97-1-8910 and the SRC under Contract 2000-NJ-850. | en |
dc.language | English | - |
dc.language.iso | en_US | en |
dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | - |
dc.subject | MOSFET | - |
dc.subject | BORON | - |
dc.subject | NM | - |
dc.title | A spacer patterning technology for nanoscale CMOS | - |
dc.type | Article | - |
dc.identifier.wosid | 000173991900015 | - |
dc.identifier.scopusid | 2-s2.0-0036494144 | - |
dc.type.rims | ART | - |
dc.citation.volume | 49 | - |
dc.citation.issue | 3 | - |
dc.citation.beginningpage | 436 | - |
dc.citation.endingpage | 441 | - |
dc.citation.publicationname | IEEE TRANSACTIONS ON ELECTRON DEVICES | - |
dc.embargo.liftdate | 9999-12-31 | - |
dc.embargo.terms | 9999-12-31 | - |
dc.contributor.localauthor | Choi, Yang-Kyu | - |
dc.contributor.nonIdAuthor | King, TJ | - |
dc.contributor.nonIdAuthor | Hu, CM | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | Fin | - |
dc.subject.keywordAuthor | FinFET | - |
dc.subject.keywordAuthor | nanoseale-CMOS | - |
dc.subject.keywordAuthor | spacer patterning process technology | - |
dc.subject.keywordAuthor | sub-10 nm pattern | - |
dc.subject.keywordAuthor | thin-body SOI | - |
dc.subject.keywordAuthor | ultrathin body (UTB) MOSFET | - |
dc.subject.keywordPlus | MOSFET | - |
dc.subject.keywordPlus | BORON | - |
dc.subject.keywordPlus | NM | - |
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