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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Journal Papers(저널논문)

Optimization of inlet concentration profile for uniform deposition in a cylindrical CVD chamber

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Choi, Do Hyungresearcher
Publisher
Pergamon-Elsevier Science Ltd
Issue Date
1998-03
Language
English
Article Type
Article
Keywords

FLOW; REACTOR

Citation

INTERNATIONAL JOURNAL OF HEAT AND MASS TRANSFER, v.42, no.6, pp.1141 - 1146

ISSN
0017-9310
URI
http://hdl.handle.net/10203/69003
Appears in Collection
ME-Journal Papers(저널논문)
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