Effect of holes and edges on the squeeze film damping of perforated micromechanical structures

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Publisher
IEEE
Issue Date
1999
Citation

IEEE JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.8, pp.296 - 301

ISSN
1057-7157
URI
http://hdl.handle.net/10203/68912
Appears in Collection
ME-Journal Papers(저널논문)
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