DC Field | Value | Language |
---|---|---|
dc.contributor.author | 최치규 | ko |
dc.contributor.author | 강민성 | ko |
dc.contributor.author | 오경숙 | ko |
dc.contributor.author | 이유성 | ko |
dc.contributor.author | 오대현 | ko |
dc.contributor.author | 황찬용 | ko |
dc.contributor.author | 손종원 | ko |
dc.contributor.author | 이정용 | ko |
dc.contributor.author | 김건호 | ko |
dc.date.accessioned | 2013-02-27T12:22:42Z | - |
dc.date.available | 2013-02-27T12:22:42Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1999-12 | - |
dc.identifier.citation | 한국재료학회지, v.9, no.11, pp.1129 - 1136 | - |
dc.identifier.issn | 1225-0562 | - |
dc.identifier.uri | http://hdl.handle.net/10203/68561 | - |
dc.language | Korean | - |
dc.publisher | 한국재료학회 | - |
dc.title | 고밀도 플라즈마 CVD 방법에 의한 TiN barrier metal 형성과 특성 | - |
dc.title.alternative | Characteristics of TiN Barrier Metal Prepared by High Density Plasma CVD Method | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.citation.volume | 9 | - |
dc.citation.issue | 11 | - |
dc.citation.beginningpage | 1129 | - |
dc.citation.endingpage | 1136 | - |
dc.citation.publicationname | 한국재료학회지 | - |
dc.contributor.localauthor | 이정용 | - |
dc.contributor.nonIdAuthor | 최치규 | - |
dc.contributor.nonIdAuthor | 강민성 | - |
dc.contributor.nonIdAuthor | 오경숙 | - |
dc.contributor.nonIdAuthor | 이유성 | - |
dc.contributor.nonIdAuthor | 오대현 | - |
dc.contributor.nonIdAuthor | 황찬용 | - |
dc.contributor.nonIdAuthor | 손종원 | - |
dc.contributor.nonIdAuthor | 김건호 | - |
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