고밀도 플라즈마 CVD 방법에 의한 TiN barrier metal 형성과 특성 Characteristics of TiN Barrier Metal Prepared by High Density Plasma CVD Method

Publisher
한국재료학회
Issue Date
1999-12
Language
KOR
Citation

한국재료학회지, v.9, no.11, pp.1129 - 1136

ISSN
1225-0562
URI
http://hdl.handle.net/10203/68561
Appears in Collection
MS-Journal Papers(저널논문)
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