CHARACTERIZATION OF AZ PN114 RESIST FOR HIGH-RESOLUTION USING ELECTRON-BEAM AND SOFT-X-RAY PROJECTION LITHOGRAPHIES

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Publisher
American Institute of Physics
Issue Date
1992-11
Language
ENG
Article Type
Article; Proceedings Paper
Citation

JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY B: MICROELECTRONICS AND NANOMETER STRUCTURES, v.10, no.6, pp.2600 - 2605

ISSN
0734-211X
URI
http://hdl.handle.net/10203/65326
Appears in Collection
RIMS Journal Papers
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