MICROSCOPIC AND MACROSCOPIC UNIFORMITY CONTROL IN PLASMA-ETCHING
- Publisher
- AMER INST PHYSICS
- Issue Date
- 1990-09
- Language
- English
- Article Type
- Article
- Citation
APPLIED PHYSICS LETTERS, v.57, no.10, pp.983 - 985
- ISSN
- 0003-6951
- Appears in Collection
- PH-Journal Papers(저널논문)
- Files in This Item
- A1990DW57000012.pdf(690.86 kB)Download
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