MICROSCOPIC AND MACROSCOPIC UNIFORMITY CONTROL IN PLASMA-ETCHING

Publisher
AMER INST PHYSICS
Issue Date
1990-09
Language
ENG
Citation

APPLIED PHYSICS LETTERS, v.57, no.10, pp.983 - 985

ISSN
0003-6951
DOI
10.1063/1.103532
URI
http://hdl.handle.net/10203/64808
Appears in Collection
PH-Journal Papers(저널논문)
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