DC Field | Value | Language |
---|---|---|
dc.contributor.author | YOON, YS | ko |
dc.contributor.author | KANG, WN | ko |
dc.contributor.author | SHIN, HS | ko |
dc.contributor.author | YOM, SS | ko |
dc.contributor.author | KIM, TW | ko |
dc.contributor.author | Lee, JeongYong | ko |
dc.contributor.author | CHOI, DJ | ko |
dc.contributor.author | BAEK, SS | ko |
dc.date.accessioned | 2013-02-25T15:38:11Z | - |
dc.date.available | 2013-02-25T15:38:11Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1993-02 | - |
dc.identifier.citation | JOURNAL OF APPLIED PHYSICS, v.73, no.3, pp.1547 - 1549 | - |
dc.identifier.issn | 0021-8979 | - |
dc.identifier.uri | http://hdl.handle.net/10203/63271 | - |
dc.description.abstract | Ferroelectric BaTiO3 thin films were grown on Si(100) substrates at a temperature of 600-degrees-C by in situ metalorganic chemical vapor deposition. X-ray diffraction and transmission electron microscopy results suggested that the [110] direction of the BaTiO3 preferred oriented films is parallel with the (100) direction of the Si substrates. Auger electron spectroscopy measurements showed that the compositions of the as-grown films were with a uniform distribution throughout the thickness of the films and with a sharp interface. These results indicate that the failure to obtain BaTiO3 epitaxial films was due to the formation of an interfacial amorphous layer prior to the creation of the films. | - |
dc.language | English | - |
dc.publisher | AMER INST PHYSICS | - |
dc.subject | ELECTRICAL-PROPERTIES | - |
dc.subject | OXIDE-FILMS | - |
dc.subject | SILICON | - |
dc.subject | LAYERS | - |
dc.title | STRUCTURAL-PROPERTIES OF BATIO3 THIN-FILMS ON SI GROWN BY METALORGANIC CHEMICAL VAPOR-DEPOSITION | - |
dc.type | Article | - |
dc.identifier.wosid | A1993KK92100083 | - |
dc.identifier.scopusid | 2-s2.0-36449009007 | - |
dc.type.rims | ART | - |
dc.citation.volume | 73 | - |
dc.citation.issue | 3 | - |
dc.citation.beginningpage | 1547 | - |
dc.citation.endingpage | 1549 | - |
dc.citation.publicationname | JOURNAL OF APPLIED PHYSICS | - |
dc.contributor.localauthor | Lee, JeongYong | - |
dc.contributor.nonIdAuthor | YOON, YS | - |
dc.contributor.nonIdAuthor | KANG, WN | - |
dc.contributor.nonIdAuthor | SHIN, HS | - |
dc.contributor.nonIdAuthor | YOM, SS | - |
dc.contributor.nonIdAuthor | KIM, TW | - |
dc.contributor.nonIdAuthor | CHOI, DJ | - |
dc.contributor.nonIdAuthor | BAEK, SS | - |
dc.type.journalArticle | Note | - |
dc.subject.keywordPlus | ELECTRICAL-PROPERTIES | - |
dc.subject.keywordPlus | OXIDE-FILMS | - |
dc.subject.keywordPlus | SILICON | - |
dc.subject.keywordPlus | LAYERS | - |
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