텅스텐 램프를 이용한 실리콘 재결정시의 SOI 다층구조에 대한 열적모델A Thermal Model for Silicon-on-Insulator Multilayer Structure in Silicon Recrystallization Using Tungsten Lamp
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 경종민 | ko |
| dc.date.accessioned | 2013-02-25T14:24:39Z | - |
| dc.date.available | 2013-02-25T14:24:39Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1984-09 | - |
| dc.identifier.citation | 전기학회논문지, v.21, no.5, pp.90 - 99 | - |
| dc.identifier.issn | 1975-8359 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/62834 | - |
| dc.language | English | - |
| dc.publisher | 대한전기학회 | - |
| dc.title | 텅스텐 램프를 이용한 실리콘 재결정시의 SOI 다층구조에 대한 열적모델 | - |
| dc.title.alternative | A Thermal Model for Silicon-on-Insulator Multilayer Structure in Silicon Recrystallization Using Tungsten Lamp | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 21 | - |
| dc.citation.issue | 5 | - |
| dc.citation.beginningpage | 90 | - |
| dc.citation.endingpage | 99 | - |
| dc.citation.publicationname | 전기학회논문지 | - |
| dc.contributor.localauthor | 경종민 | - |
| dc.description.isOpenAccess | N | - |
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