텅스텐 램프를 이용한 실리콘 재결정시의 SOI 다층구조에 대한 열적모델 A Thermal Model for Silicon-on-Insulator Multilayer Structure in Silicon Recrystallization Using Tungsten Lamp

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Publisher
대한전기학회
Issue Date
1984-09
Language
English
Citation

전기학회논문지, v.21, no.5, pp.90 - 99

ISSN
1975-8359
URI
http://hdl.handle.net/10203/62834
Appears in Collection
EE-Journal Papers(저널논문)
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