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Browse "NE-Journal Papers(저널논문)" by Subject Vacuum ultraviolet emission

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1	Evolution of vacuum ultraviolet emission in dual-frequency capacitively coupled plasmas Han, Duksun; Park, Jong-Bae; Kim, Young-Woo; Kwon, Deuk-Chul; Park, Sanghoo, CURRENT APPLIED PHYSICS, v.31, pp.239 - 245, 2021-11

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