Browse "MS-Journal Papers(저널논문)" by Subject 2-DIMENSIONAL FLUID MODEL
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| Effect of Gas Composition on TiN Thin-Film Fabrication in N2/H2/Ar/TiCl4 Inductively Coupled Plasma-Enhanced Chemical Vapor Deposition System Jang, SS; Lee, Won-Jong, JAPANESE JOURNAL OF APPLIED PHYSICS, v.40, no.8, pp.4819 - 4824, 2001-08 |
| Pressure and input power dependence of Ar/N2H2 inductively coupled plasma systems Jang, S; Lee, Won-Jong, JOURNAL OF VACUUM SCIENCE TECHNOLOGY A-VACUUM SURFACES AND FILMS, v.19, no.5, pp.2335 - 2343, 2001-09 |
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