Characterization of Two-Dimensional Impurity Profile in Silicon실리콘에서의 2차원적 불순물의 분포의 산출
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Y.Y.Yang | ko |
| dc.contributor.author | C.M.Kyung | ko |
| dc.date.accessioned | 2013-02-24T12:51:02Z | - |
| dc.date.available | 2013-02-24T12:51:02Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1986-11 | - |
| dc.identifier.citation | 전자공학회지, v.23, no.6, pp.189 - 195 | - |
| dc.identifier.issn | 1975-2377 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/57272 | - |
| dc.language | Korean | - |
| dc.publisher | 대한전자공학회 | - |
| dc.title | Characterization of Two-Dimensional Impurity Profile in Silicon | - |
| dc.title.alternative | 실리콘에서의 2차원적 불순물의 분포의 산출 | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 23 | - |
| dc.citation.issue | 6 | - |
| dc.citation.beginningpage | 189 | - |
| dc.citation.endingpage | 195 | - |
| dc.citation.publicationname | 전자공학회지 | - |
| dc.contributor.localauthor | C.M.Kyung | - |
| dc.contributor.nonIdAuthor | Y.Y.Yang | - |
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