DC Field | Value | Language |
---|---|---|
dc.contributor.author | Choi, Yang-Kyu | - |
dc.contributor.author | Chang, Leland | - |
dc.contributor.author | Ranade, Pushkar | - |
dc.contributor.author | Lee, Jeong-Soo | - |
dc.contributor.author | Ha, Daewon | - |
dc.contributor.author | Balasubramanian, Sriram | - |
dc.contributor.author | Agarwal, Aditya | - |
dc.contributor.author | Ameen, Mike | - |
dc.contributor.author | King, Tsu-Jae | - |
dc.contributor.author | Bokor, Jeffrey | - |
dc.date.accessioned | 2007-06-20T07:15:00Z | - |
dc.date.available | 2007-06-20T07:15:00Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2002-12 | - |
dc.identifier.citation | IEEE IEDM Technical Digest, v., no., pp.259 - 262 | - |
dc.identifier.uri | http://hdl.handle.net/10203/570 | - |
dc.description.sponsorship | This research is supported under MARCO contract 2001-MT-887 and SRC contact 2000-NJ-850. Devices were fabricated in the UC Berkeley Microfabrication Laboratory | en |
dc.language | ENG | - |
dc.language.iso | en_US | en |
dc.publisher | IEEE | - |
dc.title | FinFET Process Refinements for Improved Mobility and Gate Work Function Engineering | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 259 | - |
dc.citation.endingpage | 262 | - |
dc.citation.publicationname | IEEE IEDM Technical Digest | - |
dc.identifier.conferencecountry | United States | - |
dc.identifier.conferencecountry | United States | - |
dc.contributor.localauthor | Choi, Yang-Kyu | - |
dc.contributor.nonIdAuthor | Chang, Leland | - |
dc.contributor.nonIdAuthor | Ranade, Pushkar | - |
dc.contributor.nonIdAuthor | Lee, Jeong-Soo | - |
dc.contributor.nonIdAuthor | Ha, Daewon | - |
dc.contributor.nonIdAuthor | Balasubramanian, Sriram | - |
dc.contributor.nonIdAuthor | Agarwal, Aditya | - |
dc.contributor.nonIdAuthor | Ameen, Mike | - |
dc.contributor.nonIdAuthor | King, Tsu-Jae | - |
dc.contributor.nonIdAuthor | Bokor, Jeffrey | - |
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