EFFECT OF DEPOSITION VARIABLES ON THE CHEMICAL VAPOR-DEPOSITION OF TIC USING PROPANE

Publisher
A V S AMER INST PHYSICS
Issue Date
1986
Language
ENG
Citation

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.4, no.2, pp.219 - 221

ISSN
0734-2101
DOI
10.1116/1.573474
URI
http://hdl.handle.net/10203/56145
Appears in Collection
RIMS Journal Papers
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