Double force compensation method to enhance the performance of a null balance force sensor

Abstract

Microforce measurement is becoming more essential as precision industries such as biomedicine, precision chemistry, semiconductor manufacturing, and so forth develop. A null balance method has been introduced in order to improve on force measurement performances involving a loadcell. The null-balance type force sensor is analyzed and designed for the improvement of measurement performances. The measurement range and the resolution are dependent on the force generation capacity and the various error sources. These characteristics are estimated and verified according to the mechanical sensitivity and the force compensation sensitivity. Two different coil systems are designed and tested experimentally. Double force compensation is proposed in order to obtain a large range and high resolution. The measurement range of the large coil system and the resolution of the small one are fully realized by the double compensation method, After manufacturing, a range over 300 gf and resolution under +/-0.1 mgf were obtained by the double compensation method.