화학 증착법에 의한 $TiO_2$ 박막 제조시 기상에서의 반응이 증착 특성에 미치는 영향 = Effects of gas phase reaction on deposition characteristics during $TiO_2$ Thin film preparation by CVD

Advisors
김호기researcherKim, Ho-Giresearcher
Publisher
한국과학기술원
Issue Date
1992
Identifier
60430/325007 / 000901537
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 무기재료공학과, 1992.2, [ iii, 69 p. ]

URI
http://hdl.handle.net/10203/51406
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=60430&flag=t
Appears in Collection
MS-Theses_Master(석사논문)
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