화학 증착법에 의한 $TiO_2$ 박막 제조시 기상에서의 반응이 증착 특성에 미치는 영향Effects of gas phase reaction on deposition characteristics during $TiO_2$ Thin film preparation by CVD
- Advisors
- 김호기researcher; Kim, Ho-Giresearcher
- Description
- 한국과학기술원 : 무기재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1992
- Identifier
- 60430/325007 / 000901537
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 무기재료공학과, 1992.2, [ iii, 69 p. ]
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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