MOCVD 법으로 증착된 $Y_1Ba_2Cu_3O_{7-x}$ 박막의 에칭특성에 관한 연구A study on etching properties of metal organic chemical vapor deposited $Y_1Ba_2Cu_3O_{7-x}$ thin film
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 천성순 | - |
| dc.contributor.advisor | Chun, Soung-Soon | - |
| dc.contributor.author | 황두섭 | - |
| dc.contributor.author | Hwang, Doo-Sup | - |
| dc.date.accessioned | 2011-12-15T01:42:57Z | - |
| dc.date.available | 2011-12-15T01:42:57Z | - |
| dc.date.issued | 1992 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=60418&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/51394 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1992.2, [ [iii], 62 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | MOCVD 법 | - |
| dc.subject | Metal organic vapor deposition | - |
| dc.subject | Critical temperatures | - |
| dc.title | MOCVD 법으로 증착된 $Y_1Ba_2Cu_3O_{7-x}$ 박막의 에칭특성에 관한 연구 | - |
| dc.title.alternative | A study on etching properties of metal organic chemical vapor deposited $Y_1Ba_2Cu_3O_{7-x}$ thin film | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 60418/325007 | - |
| dc.description.department | 한국과학기술원 : 전자재료공학과, | - |
| dc.identifier.uid | 000901600 | - |
| dc.contributor.localauthor | 천성순 | - |
| dc.contributor.localauthor | Chun, Soung-Soon | - |
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.