Aluminium oxide 박막의 reactive ion etching 특성 = A study on the reactive ion etching properties of aluminium oxide thin films

Advisors
천성순researcherChun, Soung-Soonresearcher
Publisher
한국과학기술원
Issue Date
1992
Identifier
60417/325007 / 000901104
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1992.2, [ [iii], 64 p. ]

URI
http://hdl.handle.net/10203/51393
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=60417&flag=t
Appears in Collection
MS-Theses_Master(석사논문)
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