RF 마그네트론 스퍼터링법에 의하여 증착한 AlN와 ZnO 박막의 성장기구에 관한 투과전자현미경 연구 = A TEM study on the growth mechanisms of AlN and ZnO thin films by RF magnetron sputterring

Advisors
이정용researcherLee, Jeong-Yongresearcher
Publisher
한국과학기술원
Issue Date
1995
Identifier
99506/325007 / 000933515
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1995.2, [ iii, 81 p. ]

URI
http://hdl.handle.net/10203/51282
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=99506&flag=t
Appears in Collection
MS-Theses_Master(석사논문)
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