스핀코팅법으로 Cu를 흡착시킨 LPCVD 비정질 실리콘 박막의 고상결정화Solid phase crystallzation of LPCVD a-Si films adsorbed with Cu by spin coating
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 안병태 | - |
| dc.contributor.advisor | Ahn, Byung-Tae | - |
| dc.contributor.author | 조성우 | - |
| dc.contributor.author | Cho, Seong-Woo | - |
| dc.date.accessioned | 2011-12-15T01:41:03Z | - |
| dc.date.available | 2011-12-15T01:41:03Z | - |
| dc.date.issued | 1995 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=99503&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/51279 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1995.2, [ iii, 83 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 스핀 코팅 | - |
| dc.subject | Chemical vapor deposition | - |
| dc.title | 스핀코팅법으로 Cu를 흡착시킨 LPCVD 비정질 실리콘 박막의 고상결정화 | - |
| dc.title.alternative | Solid phase crystallzation of LPCVD a-Si films adsorbed with Cu by spin coating | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 99503/325007 | - |
| dc.description.department | 한국과학기술원 : 전자재료공학과, | - |
| dc.identifier.uid | 000933481 | - |
| dc.contributor.localauthor | 조성우 | - |
| dc.contributor.localauthor | Cho, Seong-Woo | - |
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