스핀코팅법으로 Cu를 흡착시킨 LPCVD 비정질 실리콘 박막의 고상결정화 = Solid phase crystallzation of LPCVD a-Si films adsorbed with Cu by spin coating

Advisors
안병태researcherAhn, Byung-Taeresearcher
Publisher
한국과학기술원
Issue Date
1995
Identifier
99503/325007 / 000933481
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1995.2, [ iii, 83 p. ]

Keywords

스핀 코팅; Chemical vapor deposition

URI
http://hdl.handle.net/10203/51279
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=99503&flag=t
Appears in Collection
MS-Theses_Master(석사논문)
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