RF PECVD 법에 의해 증착된 TiN 박막 특성에 관한 연구A study on the characteristics of the TiN thin films deposited by RF PECVD
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이원종 | - |
| dc.contributor.advisor | Lee, Won-Jong | - |
| dc.contributor.author | 전병혁 | - |
| dc.contributor.author | Jun, Byung-Hyuk | - |
| dc.date.accessioned | 2011-12-15T01:40:59Z | - |
| dc.date.available | 2011-12-15T01:40:59Z | - |
| dc.date.issued | 1995 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=99499&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/51275 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1995.2, [ iv, 75 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | RF PECVD 법에 의해 증착된 TiN 박막 특성에 관한 연구 | - |
| dc.title.alternative | A study on the characteristics of the TiN thin films deposited by RF PECVD | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 99499/325007 | - |
| dc.description.department | 한국과학기술원 : 전자재료공학과, | - |
| dc.identifier.uid | 000933436 | - |
| dc.contributor.localauthor | 전병혁 | - |
| dc.contributor.localauthor | Jun, Byung-Hyuk | - |
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