RF PECVD 법에 의해 증착된 TiN 박막 특성에 관한 연구A study on the characteristics of the TiN thin films deposited by RF PECVD
- Advisors
- 이원종researcher; Lee, Won-Jongresearcher
- Description
- 한국과학기술원 : 전자재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1995
- Identifier
- 99499/325007 / 000933436
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1995.2, [ iv, 75 p. ]
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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