Via-hole filling을 위한 텅스텐 저압화학증착에 관한 연구 = A study on the low pressure chemical vapor deposition of tungsten for via-hole filling

Advisors
천성순researcherChun, Soung-Soonresearcher
Publisher
한국과학기술원
Issue Date
1990
Identifier
68028/325007 / 000891089
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 재료공학과, 1990, [ [iii], 67 p. ]

URI
http://hdl.handle.net/10203/51212
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=68028&flag=t
Appears in Collection
MS-Theses_Master(석사논문)
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