플라즈마 화학증착된 TiN 박막의 분산분석에 의한 증착특성 및 기계적성질에 관한 연구 = A study on the deposition characteristics by analysis of variance and mechanical properties by plasma enhanced chemical vapor deposition

Advisors
천성순researcherChun, Soung-Soonresearcher
Publisher
한국과학기술원
Issue Date
1990
Identifier
67769/325007 / 000891417
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 재료공학과, 1990, [ [iv], 103 p. ]

URI
http://hdl.handle.net/10203/51210
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=67769&flag=t
Appears in Collection
MS-Theses_Master(석사논문)
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