RTP를 이용하여 열처리한 polycide 구조에서 tungsten silicide 의 전기적 특성 = Electrical properties of tungsten silicide in polycide structure annealed by RTP method

Advisors
임호빈researcherIm, Ho-Binresearcher
Publisher
한국과학기술원
Issue Date
1990
Identifier
67538/325007 / 000881140
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 재료공학과, 1990.2, [ iii, 54 p. ]

Keywords

Capacitance-voltage measurements

URI
http://hdl.handle.net/10203/51187
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=67538&flag=t
Appears in Collection
MS-Theses_Master(석사논문)
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