플라즈마 화학증착법에 의하여 증착된 aluminum oxide 박막의 C-V 특성에 증착 변수가 미치는 영향 = The effect of deposition parameters on C-V characteristics of aluminum oxide thin films deposited by PECVD

Advisors
천성순researcherChun, Soung-Soonresearcher
Publisher
한국과학기술원
Issue Date
1990
Identifier
67533/325007 / 000881080
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 재료공학과, 1990.2, [ [iv], 90 p. ]

Keywords

Electrical properties

URI
http://hdl.handle.net/10203/51182
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=67533&flag=t
Appears in Collection
MS-Theses_Master(석사논문)
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