Silicon 화학 증착에 있어 기상 반응 모델 및 광학적, 전기적 특성에 관한 연구A study on the gas-phase reaction modeling and the optical and electrical properties of chemically vapor-deposited silicon
- Advisors
- 남수우; Nam, Soo-Woo
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1989
- Identifier
- 67000/325007 / 000871152
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 1989.2, [ iv, 67 p. ]
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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