Silicon 화학 증착에 있어 기상 반응 모델 및 광학적, 전기적 특성에 관한 연구 = A study on the gas-phase reaction modeling and the optical and electrical properties of chemically vapor-deposited silicon

Advisors
남수우researcherNam, Soo-Wooresearcher
Publisher
한국과학기술원
Issue Date
1989
Identifier
67000/325007 / 000871152
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 재료공학과, 1989.2, [ iv, 67 p. ]

URI
http://hdl.handle.net/10203/51147
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=67000&flag=t
Appears in Collection
MS-Theses_Master(석사논문)
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