CVD로 제조한 SiC 증착층의 미세구조에 관한 연구 = A study on the microstructure of SiC deposited by chemical vapor deposition

Advisors
이재영researcherLee, Jai-Youngresearcher
Publisher
한국과학기술원
Issue Date
1988
Identifier
66479/325007 / 000861153
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 재료공학과, 1988.2, [ [iv], 54 p. ]

Keywords

Deposition parameter.; 탄화규소.

URI
http://hdl.handle.net/10203/51114
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=66479&flag=t
Appears in Collection
MS-Theses_Master(석사논문)
Files in This Item
There are no files associated with this item.
  • Hit : 65
  • Download : 0
  • Cited 0 times in thomson ci

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0