$Si_3N_4$-TiC ceramic 에 Titanium carbide의 화학증착에 관한 연구The effects of deposition variables on the chemical vapor deposition of TiC onto $Si_3N_4$-TiC composite

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dc.contributor.advisor천성순-
dc.contributor.advisorChun, Soung-Soon-
dc.contributor.author박영진-
dc.contributor.authorPark, Young-Jin-
dc.date.accessioned2011-12-15T01:37:51Z-
dc.date.available2011-12-15T01:37:51Z-
dc.date.issued1987-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=65951&flag=dissertation-
dc.identifier.urihttp://hdl.handle.net/10203/51078-
dc.description학위논문(석사) - 한국과학기술원 : 재료공학과, 1987.2, [ iv, 74 p. ]-
dc.languagekor-
dc.publisher한국과학기술원-
dc.subject질화규소.-
dc.title$Si_3N_4$-TiC ceramic 에 Titanium carbide의 화학증착에 관한 연구-
dc.title.alternativeThe effects of deposition variables on the chemical vapor deposition of TiC onto $Si_3N_4$-TiC composite-
dc.typeThesis(Master)-
dc.identifier.CNRN65951/325007-
dc.description.department한국과학기술원 : 재료공학과, -
dc.identifier.uid000851142-
dc.contributor.localauthor천성순-
dc.contributor.localauthorChun, Soung-Soon-
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MS-Theses_Master(석사논문)
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