비정질 $Si_3N_4$ 박막의 화학증착과 계면전하 특성에 관한 연구A study on chemical vapor deposition of amorphous $Si_3N_4$ thin film and the characteristics of interface charge
- Advisors
- 천성순researcher; Chun, Sung-Soonresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1986
- Identifier
- 65409/325007 / 000841136
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 1986.2, [ [iii], 55 p. ]
- Keywords
Surface reactions.
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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