$Si_3N_4$ 의 화학증착과 증착층의 전기적 성질에 대한 연구A study on chemical vapor deposition of $Si_3N_4$ thin film and its electrical properties
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 김호기 | - |
| dc.contributor.advisor | Kim, Ho-Gi | - |
| dc.contributor.author | 김광준 | - |
| dc.contributor.author | Kim, Kwang-Jun | - |
| dc.date.accessioned | 2011-12-15T01:36:01Z | - |
| dc.date.available | 2011-12-15T01:36:01Z | - |
| dc.date.issued | 1985 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=64856&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50964 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1985.2, [ [iii], 46 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | $Si_3N_4$ 의 화학증착과 증착층의 전기적 성질에 대한 연구 | - |
| dc.title.alternative | A study on chemical vapor deposition of $Si_3N_4$ thin film and its electrical properties | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 64856/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000831034 | - |
| dc.contributor.localauthor | 김호기 | - |
| dc.contributor.localauthor | Kim, Ho-Gi | - |
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